发明名称 Semiconductor device and method of manufacturing the same
摘要 A first impurity diffusion layer forms one of source/drain regions and also forms a bit line. A first semiconductor layer, a channel semiconductor layer and a second semiconductor layer, which forms the other of source/drain regions and also forms a storage node, are disposed on the first impurity diffusion layer. A capacitor insulating film is disposed on a second conductive layer. A cell plate is disposed on a storage node with the capacitor insulating film therebetween. A capacitance of the bit line is reduced, and a dynamic random access memory thus constructed performs a high-speed operation.
申请公布号 US6383860(B2) 申请公布日期 2002.05.07
申请号 US20010908607 申请日期 2001.07.20
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 MAEDA SHIGENOBU;INOUE YASUO;KURIYAMA HIROTADA;MAEGAWA SHIGETO;KANAMOTO KYOZO;IWAMATSU TOSHIAKI
分类号 H01L27/10;H01L21/77;H01L21/8242;H01L21/84;H01L27/06;H01L27/108;H01L27/12;H01L29/78;H01L29/786;(IPC1-7):H01L21/824 主分类号 H01L27/10
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