| 摘要 |
A pressure gauge device that is operated as a thermal conduction manometer contains a measuring resistor (131) that is arranged in layer form on a self-supporting carrier foil and is in defined thermal contact with a gas whose pressure is to be measured. The thermal contact with the gas is through the carrier foil (11), a thermal conducting layer (123) and optionally through an extra absorber layer (124). The resistance, dependent on gas pressure, of the measuring resistor (131) is detected by a bridge circuit in which each measuring resistor (131) is assigned a reference resistor (136) whose resistance itself is dependent on or independent of pressure.
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