HIGH PRECISE BLASTING METHOD AND HIGH PRECISE BLASTING DEVICE

摘要

PURPOSE: To provide a high precise blasting method and device preventing the decrease of blasting efficiency even when the blasting is progressed and preventing the damage of a non-blasting portion even without applying masking. CONSTITUTION: In a blasting method that a blasting material is ejected through a nozzle by compressed air to apply machining on a substrate, a jet of an blasting material comprises intermittent jets where the jet and a stop are repeated at a short interval; and a high precise blasting method that the intermittent jets and a continuous jet are combined together. The high precise blasting device comprises a nozzle unit to effect forced feed of the blasting material to the nozzle by compressed air; and a work table to horizontally and vertically move a substrate, and is formed such that a solenoid valve to effect the jet and the stop of a blasting material and a control device to output an intermittent operation signal to the solenoid valve are connected to the nozzle unit.