| 摘要 |
PURPOSE: A shaft sealing apparatus is provided to excellently seal gap between a driving shaft and other parts around the driving shaft and to simplify the constitution with reduced size. CONSTITUTION: A shaft sealing apparatus comprises a vacuum casing(110) formed with a vacuum chamber(111), driving shafts(130,140) having outer cylindrical surfaces(130b,140b) and movably extending in the vacuum chamber of the vacuum casing, and sealing rings(153,163) in the form of an annular ring shape and including a sealing lip held in contact with the outer cylindrical surface of the driving shaft, annular spring members operative to impart a force to the sealing lip to ensure that the sealing lip is held in tight contact with the outer cylindrical surface of the driving shaft, and a peripheral portion radially outwardly extending from the sealing lip. The outer cylindrical surface of the driving shaft is smaller in surface roughness than 0.1(mu m). |
