MICRO-FLUORESCENCE X-RAY ANALYZER

摘要

PURPOSE: A micro-fluorescence x-ray analyzer is provided to perform a micro-fluorescence x-ray analysis and to effectively detect micro-fluorescence x-ray from a sample exposed to highstrength x-ray illumination. CONSTITUTION: A micro-fluorescence x-ray analyzer(10) includes an x-ray beam generator generating x-ray beams projected at a spot of a sample and generating plural fluorescence x-ray photons from the spot of the sample; plural electrically semiconductive detectors(18) disposed around the spot to capture fluorescence x-ray photons in the energy range common to all detectors, and to generate plural electric pulses suitable for analysis of the sample; and a multi-input process unit(20) receiving so that the pulses from each detector is transmitted to individual input of the process unit and analyzing plural pulses and generating output with using pulses received from all detectors with reacting on photons within the energy range common to all detectors. The x-ray generator includes a capillary optical instrument.