SLIDING APPARATUS OF WAFER JOINING APPARATUS FOR MOVING SPACER

摘要

PURPOSE: A sliding apparatus for moving spacer is provided to simplify and stabilize the operation of the sliding apparatus by simultaneously pressing of a wafer and separating of spacers. CONSTITUTION: A sliding apparatus comprises three spacer pushers(27) fixed to a push disc, sliders(15) respectively contacted to the spacer pushers(27) and spacers(3) respectively fixed on the sliders(15). The spacer pushers(27) press the incline planes(15a) of the sliders(15) by descending of a push disc. The pressing force supplied to the incline planes(15a) moves the sliders(15) backward by sliding movement. At this time, the spacers(3) simultaneously move to same direction, thereby separating probes from two substrates.