发明名称 WORK SUPPORT FOR LOADING DEVICE
摘要 PURPOSE: To facilitate a cleaning and exchange work for a work support part and to prevent damaging of a work during high temperature heat treatment. CONSTITUTION: The work support constitutes a part of a cassette 1 on which works W are loaded in multistage and is provided with a round shaft 2 and its support member 3, etc. The round shaft 2 is formed in a direction Y in one shaft in this example, and formed in a direction X on both sides. The support member 3 is mounted on four stays 13 at each of both sides, and the round shaft 2 is supported in four spots. Thus, during cleaning and exchange of the work support, the round shaft 2 is easily mounted on and demounted from the support member 3, and simple, rapid, and sufficient cleaning is practicable at the external part of a cassette. Exchange is also facilitated. Further, since the work is continuously supported in a long state, the support bearing of the work is low, and the work is prevented from being damaged even under high temperature treatment and vibration environment.
申请公布号 KR20020032287(A) 申请公布日期 2002.05.03
申请号 KR20010035235 申请日期 2001.06.21
申请人 ESPEC CORP. 发明人 AMAGISHI NOBUO;NAGANO YUKIO
分类号 F27D3/12;B65G61/00;F27D5/00;H01L21/68;H01L21/683;(IPC1-7):B65G61/00 主分类号 F27D3/12
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