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发明名称
LASER BASED METHOD AND SYSTEM FOR INTEGRATED CIRCUIT REPAIR OR RECONFIGURATION
摘要
申请公布号
HK1022049(A1)
申请公布日期
2002.05.03
申请号
HK20000100967
申请日期
2000.02.18
申请人
ELECTRO SCIENTIFIC INDUSTRIES INC.
发明人
SWENSON, EDWARD J;SUN, YUNLONG;HARRIS, RICHARD S
分类号
H01L21/302;H01L21/3205;H01L21/768;H01L21/82;H01L23/52;(IPC1-7):H01L
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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