A material with a low volume resistivity, aluminium nitride sintered body and article for manufacturing semiconductors

摘要

A material with a low volume resistivity at room temperature composed of an aluminum nitride sintered body is provided. The sintered body contains samarium in a converted content calculated as samarium oxide of not lower than 0.04 mole percent, and the sintered body contains aluminum nitride phase and samarium-aluminum complex oxide phase. The samarium-aluminum complex oxide phase forms intergranular layers with a low resistivity along the intergranular phase between aluminum nitride grains.