USING DEUTERATED SOURCE GASES TO FABRICATE LOW LOSS GeSiON SiON WAVEGUIDES

摘要

The present invention provides a method of manufacturing optical devices which includes the steps of providing a substrate and forming at least one optical layer on the substrate. The optical layer is formed by a CVD process which includes a deuterated source gas. The present invention also provides an optical device which includes a substrate and an optical layer including deuterium.