发明名称 Appliance and method for localizing residual matter on surface of semiconductor discs employs crosswires to located coordinates of accumulations of residual matter
摘要 The appliance (1) has a first circular recess (20) with smaller diameter and is deeper than a second (20'). An oblong slot (21) deeper than the recesses facilitates the insertion of a disc into the support system so formed. Knobs (5,5') sliding in guide channels (3,3') adjust the position of crosswires (8,8') against scales (10,10'). Discs, after treatment which renders fluorescent accumulations of residual matter, are placed in the appliance and the crosswires adjusted to provide x-y coordinates of their position
申请公布号 DE10059463(A1) 申请公布日期 2002.05.02
申请号 DE20001059463 申请日期 2000.11.30
申请人 INFINEON TECHNOLOGIES AG 发明人 GEYER, STEFAN;HUNGER, RUEDIGER
分类号 H01L21/00;(IPC1-7):G01N21/88;G01B21/04;H01L21/66;H01L21/68 主分类号 H01L21/00
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