发明名称 |
Position measuring device for detecting the relative position of a scanning unit, comprising at least one scanning grating unit, a deviating element in the form of a ridge prism, and a plurality of optoelectric detectors |
摘要 |
Position measurement device, has at least one scan grating unit, a ridge prism an a quantity of optoelectric detectors. The operation of the ridge prism is orientated parallel to the measuring direction and acts as a retro-reflector in a direction which is perpendicular oriented in relation to the measuring direction in the plane of scale.
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申请公布号 |
DE10144659(A1) |
申请公布日期 |
2002.05.02 |
申请号 |
DE20011044659 |
申请日期 |
2001.09.08 |
申请人 |
DR. JOHANNES HEIDENHAIN GMBH |
发明人 |
HOLZAPFEL, WOLFGANG;SCHREIBER, ANDREAS |
分类号 |
G01D5/347;G01D5/36;G01D5/38;G03F7/20;(IPC1-7):G01B11/00;G01D5/30 |
主分类号 |
G01D5/347 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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