发明名称 Position measuring device for detecting the relative position of a scanning unit, comprising at least one scanning grating unit, a deviating element in the form of a ridge prism, and a plurality of optoelectric detectors
摘要 Position measurement device, has at least one scan grating unit, a ridge prism an a quantity of optoelectric detectors. The operation of the ridge prism is orientated parallel to the measuring direction and acts as a retro-reflector in a direction which is perpendicular oriented in relation to the measuring direction in the plane of scale.
申请公布号 DE10144659(A1) 申请公布日期 2002.05.02
申请号 DE20011044659 申请日期 2001.09.08
申请人 DR. JOHANNES HEIDENHAIN GMBH 发明人 HOLZAPFEL, WOLFGANG;SCHREIBER, ANDREAS
分类号 G01D5/347;G01D5/36;G01D5/38;G03F7/20;(IPC1-7):G01B11/00;G01D5/30 主分类号 G01D5/347
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