| 摘要 |
A catadioptric system comprising a first image-forming optical system having at least 2 reflecting mirrors and adapted to form a first intermediate image of a first surface on the basis of light from the first surface, a second image-forming optical system having at least 2 reflecting mirrors and adapted to form a second intermediate image of the first surface on the basis of light through the first image-forming optical system, and a dioptric type third image-forming optical system adapted to form the final image of the first surface on a second surface on the basis of light through the second image-forming optical system, wherein all optical components that constitute the first, second and third image-forming optical systems are arranged along a single straight optical axis.
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