Fabrication of a probe card

摘要

A probe card includes a card plate (14) and a plurality of probe pins (16) fixed onto the card plate (14). Each of the probe pins (16) has a metallic body (32) made of rhenium-containing tungsten, and a nickel film (34) and a rhodium film (36) consecutively formed on the metallic body (32) by a plating technique using a liquid flow of a plating liquid.