DÜNNE SCHICHTEN VON TYP ABO3 MIT ÜBERSCHUSS-A-TYP UND B-TYP ELEMENTEN UND HERSTELLUNGSVERFAHREN VON INTEGRIERTEN SCHALTUNGEN UNTER VERWENDUNG DIESER SCHICHTEN,申请号DE19956026082-传众专利搜索

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发明名称	DÜNNE SCHICHTEN VON TYP ABO3 MIT ÜBERSCHUSS-A-TYP UND B-TYP ELEMENTEN UND HERSTELLUNGSVERFAHREN VON INTEGRIERTEN SCHALTUNGEN UNTER VERWENDUNG DIESER SCHICHTEN
摘要
申请公布号	DE69526082(D1)	申请公布日期	2002.05.02
申请号	DE19956026082	申请日期	1995.06.30
申请人	SYMETRIX CORP., COLORADO SPRINGS;MATSUSHITA ELECTRIC INDUSTRIAL CO.,LTD.	发明人	AZUMA, MASAMICHI;PAZ DE ARAUJO, A.;SCOTT, C.
分类号	C23C18/12;H01L21/02;H01L21/314;H01L21/316;H01L21/8242;H01L27/108;H01L27/115;(IPC1-7):H01L21/320	主分类号	C23C18/12
代理机构		代理人
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