发明名称 DEVICE AND METHOD FOR ELECTROLESS PLATING
摘要 A device and a method for electroless plating; the device capable of easily forming a plating film of uniform thickness on the plated surface of a plated material, comprising a holding part (10) having a heating part (14) and holding the plated material with the plated surface facing downward and a plating bath (24) allowing electroless plating solution (22) with a specified temperature to lead into a plating chamber (28) and holding the solution while allowing the solution to overflow from an overflow weir, wherein the plated material held by the holding part (10) is brought into contact with the plating solution (22) in the plating bath (24) for plating the plated material.
申请公布号 WO0234962(A1) 申请公布日期 2002.05.02
申请号 WO2001JP09337 申请日期 2001.10.24
申请人 EBARA CORPORATION;HONGO, AKIHISA;MISHIMA, KOJI;INOUE, HIROAKI;KIMURA, NORIO;KARIMATA, TSUTOMU 发明人 HONGO, AKIHISA;MISHIMA, KOJI;INOUE, HIROAKI;KIMURA, NORIO;KARIMATA, TSUTOMU
分类号 C23C18/16;C23C18/18;H01L21/288;H01L21/768;(IPC1-7):C23C18/16 主分类号 C23C18/16
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