TREATED SUBSTRATE TRANSFER SYSTEM IN SEMICONDUCTOR TREATMENT EQUIPMENT

摘要

A treated substrate (W) transfer system in a semiconductor treatment equipment (2), comprising guide rails (42) disposed in a common transfer area (6) for transferring the treated substrate (W) between a plurality of semiconductor treatment devices (8A to 8F), a mobile body (44A) movably disposed along the guide rails (42), and a first support part (78) for supporting the treated substrate (W) disposed on the mobile body (44A), having an engagement step part (82) of L-shape in cross section for placing the edge of the treated substrate (W) thereon, and having one or a plurality of cut-out parts (81) for a plurality of handling arm devices (100 to 112) handling the treated substrate to gain access thereto.