| 发明名称 |
SELF-COMPENSATED CERAMIC STRAIN GAGE FOR USE AT HIGH TEMPERATURES |
| 摘要 |
A self-compensated sensor (10) is disclosed which is fabricated by sputtering Pt and ITO films that (12) were subsequently patterned. The sensor includes a wide band semiconductor and metal. For generating experimental fata four Pt bond pads are presented (16a, 16b, 16c and 16d).
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| 申请公布号 |
WO0235178(A1) |
申请公布日期 |
2002.05.02 |
| 申请号 |
WO2000US11334 |
申请日期 |
2000.04.27 |
| 申请人 |
THE BOARD OF GOVERNORS FOR HIGHER EDUCATION, STATE OF RHODE ISLAND AND PROVIDENCE PLANTATIONS;GREGORY, OTTO, J. |
发明人 |
GREGORY, OTTO, J. |
| 分类号 |
G01B7/16;(IPC1-7):G01B7/16 |
主分类号 |
G01B7/16 |
| 代理机构 |
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代理人 |
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