SEED CRYSTAL HOLDER WITH A LATERAL BORDER FOR AN SIC SEED CRYSTAL
摘要
A seed crystal holder holds a SiC seed crystal while a SiC bulk single crystal is grown on the front surface of the seed crystal. The holder includes a back surface body with a bearing surface for bearing against a back surface of the SiC seed crystal. The holder includes a lateral mount for receiving the back surface body and the SiC seed crystal. The lateral mount has a projection located on an end facing the SiC seed crystal. The SiC seed crystal rests on the projection.
申请公布号
EP1200651(A1)
申请公布日期
2002.05.02
申请号
EP20000952900
申请日期
2000.07.04
申请人
SIEMENS AKTIENGESELLSCHAFT
发明人
STEIN, RENE;KUHN, HARALD;VOELKL, JOHANNES;ZINTL, WOLFGANG