| 摘要 |
<p>For bay type structures of semiconductor wafer transport systems an arrangement is provided with interbay rail tacks (10) and intrabay rail tracks (20) mounted on each other, and the vehicles (11) of the interbay system, and the carrier transfer cars (21) of the intrabay system can move freely bi-directional inside the bay area without obstructing each other. The carrier transfer car is designed such that a wafer carrier (1) can be directly loaded from the vehicle (11) to the load port (31) of a processing machine. The arrangement simplifies and accelerates the transfer, and enhances the flexibility of vehicles in wafer transport.</p> |
