摘要 |
<p>A manufacturing device for a substrate with transparent conductive film capable of not only preventing an abnormal discharge from occurring but also increasing the strength of a transfer roller, wherein a carrier for carrying a tray holding an insulated substrate through a carrier formed of a cylindrical body (partition body) and a cylindrical body (carrier body) is transferred by the transfer roller having a core made of, instead of ceramics, a metal with higher rigidity than the ceramics in the atmosphere of evaporated particles of an ITO sintered body, and the atmosphere of the evaporated particles is separated from the outer surface of the cylindrical body (carrier body) by the cylindrical body (partition body) to form a labyrinth on an evaporated particle-adhered route.</p> |