发明名称 System and method of optically testing multiple edge-emitting semiconductor lasers residing on a common wafer
摘要 A system and method of testing multiple edge-emitting lasers on a common wafer is provided. This is accomplished by providing, for each edge-emitting laser on a common fabrication wafer, a structure that re-directs a portion of the edge-emitted light from each edge-emitting laser in a direction such that the re-directed portion from each edge-emitting laser can be measured while the edge-emitting lasers are still on the fabrication wafer. Each edge-emitting laser on the fabrication wafer can therefore be easily tested before cleaving or breaking the wafer into multiple pieces.
申请公布号 US2002051474(A1) 申请公布日期 2002.05.02
申请号 US20010023998 申请日期 2001.12.21
申请人 UNIVERSITY OF MARYLAND, BALTIMORE COUNTY 发明人 CHOA FOW-SEN
分类号 H01S5/00;H01S5/02;H01S5/12;H01S5/18;H01S5/187;H01S5/40;H01S5/42;(IPC1-7):H01S5/00;H01S3/08 主分类号 H01S5/00
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