发明名称 |
System and method of optically testing multiple edge-emitting semiconductor lasers residing on a common wafer |
摘要 |
A system and method of testing multiple edge-emitting lasers on a common wafer is provided. This is accomplished by providing, for each edge-emitting laser on a common fabrication wafer, a structure that re-directs a portion of the edge-emitted light from each edge-emitting laser in a direction such that the re-directed portion from each edge-emitting laser can be measured while the edge-emitting lasers are still on the fabrication wafer. Each edge-emitting laser on the fabrication wafer can therefore be easily tested before cleaving or breaking the wafer into multiple pieces.
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申请公布号 |
US2002051474(A1) |
申请公布日期 |
2002.05.02 |
申请号 |
US20010023998 |
申请日期 |
2001.12.21 |
申请人 |
UNIVERSITY OF MARYLAND, BALTIMORE COUNTY |
发明人 |
CHOA FOW-SEN |
分类号 |
H01S5/00;H01S5/02;H01S5/12;H01S5/18;H01S5/187;H01S5/40;H01S5/42;(IPC1-7):H01S5/00;H01S3/08 |
主分类号 |
H01S5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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