Device for step-and-repeat exposure of a substrate

摘要

An exposure device including a lamp (1) and integrator lens (4) for exposure of a substrate (10) having a plurality of rectangular exposure zones and including a substrate carrier capable of supporting a substrate. The substrate moves in the X-Y directions and the respective exposure zones on the substrate are progressively exposed. The exposure device also includes a holding part (12) for the integrator lens, which is composed of a parallel arrangement of several lenses yielding a rectangular cross sectional shape, that enables the integrator lens to turn 90 DEG around the optical axis of the incident light. This arrangement permits precise illumination of the exposure zones on the substrate as the exposure zones on the substrate change orientation. <IMAGE>