| 摘要 |
<p>Disclosed are an apparatus and a method for manufacturing an electrode of hydrous ruthenium oxide thin film. The apparatus comprises a scanner for introducing a precursor solution and spraying said precursor solution; a substrate having said precursor solution sprayed thereon; a substrate-supporting base for supporting said substrate and including a halogen lamp therein for heating said substrate; a direct current power supply connected to said substrate-supporting base and said scanner; a distance adjuster for adjusting the distance between said substrate-supporting base and said scanner; and a temperature controller for controlling said substrate-supporting base. Under a strong electric field, the ruthenium precursor solution is sprayed, to yield a porous thin film electrode having very fine particles. The electrode prepared by the method which is advantageous in terms of simplified preparation process and shorter period of time required for preparation, compared to conventional methods, has more excellent properties than those of a conventional ruthenium oxide electrode for supercapacitor or a composite electrode of ruthenium oxide and activated carbon.</p> |
