发明名称 Memory cell structure of flash memory having circumventing floating gate and method for fabricating the same
摘要 The present invention relates to a memory cell structure of a flash memory and a method for fabricating the same and, more particularly, to a flash memory having circumventing floating gates and a method for fabricating the same. In the proposed memory cell, a floating gate and a tunneling oxide are etched to form an annular shape situated between a drain, a source, and two field oxides. An interpoly dielectric and a control gate cover in turn on the floating gate and on the surface of the substrate not covered by the floating gate by means of self-alignment. The present invention can not only achieve self-alignment to form the control gate and apply to high-integration memory cells with small areas, but also can effectively increase the high capacitance coupling ratio thereof to enhance the tunneling effect of hot electrons.
申请公布号 US2002052079(A1) 申请公布日期 2002.05.02
申请号 US20010948675 申请日期 2001.09.10
申请人 WEN WEN YING 发明人 WEN WEN YING
分类号 H01L21/28;H01L27/115;H01L29/423;(IPC1-7):H01L21/336 主分类号 H01L21/28
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