摘要 |
The present invention relates to a memory cell structure of a flash memory and a method for fabricating the same and, more particularly, to a flash memory having circumventing floating gates and a method for fabricating the same. In the proposed memory cell, a floating gate and a tunneling oxide are etched to form an annular shape situated between a drain, a source, and two field oxides. An interpoly dielectric and a control gate cover in turn on the floating gate and on the surface of the substrate not covered by the floating gate by means of self-alignment. The present invention can not only achieve self-alignment to form the control gate and apply to high-integration memory cells with small areas, but also can effectively increase the high capacitance coupling ratio thereof to enhance the tunneling effect of hot electrons.
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