Spectral ellipsometer

摘要

The present invention provides a spectral ellipsometer with which it is possible to easily focus all optical axes of multiwavelengths onto one spot by means of a remarkably simple and rational improved technique. <??>The present invention is a spectral ellipsometer, which is constituted of a light incidence optical system for achieving spot incidence of polarization light of multiwavelengths onto a sample surface and a detecting optical system for outputting information concerning the sample surface based on an amount of change in polarization of elliptical polarization reflected by the sample surface, wherein a polarizer employed in the above light incidence optical system is a prism with a shape of a light-incident surface and light-outgoing surface thereof being a curved surface that is orthogonal with respect to a progressing direction of the respective directions of incident and outgoing light. <IMAGE>