A METHOD AND AN APPARATUS FOR EXCITATION OF A PLASMA

摘要

A method of exciting a plasma, wherein a gas is subjected to an electrical field generated by means of a plurality of electrodes. One electrode is form ed by an outer metal pipe (1). This outer metal pipe (1) surrounds one or more inner metal pipes (2) which form the other electrode. The idea is to turn it to account that plasma is generated in one or more of the inner pipes. These pipes are easier to clean, and the cleaning process is therefore simplified considerably. To this should be added that the distance between the electrod es may now be increased considerably, thereby reducing the risk of breakdown between the electrodes.