| 发明名称 |
Semiconductor device having uniform spacers |
| 摘要 |
A semiconductor device having both functional and non-functional or dummy lines, regions and/or patterns to create a topology that causes the subsequently formed spacers to be more predictable and uniform in shape and size.
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| 申请公布号 |
US6380588(B1) |
申请公布日期 |
2002.04.30 |
| 申请号 |
US20000567013 |
申请日期 |
2000.05.09 |
| 申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
EN WILLIAM G.;NGO MINH VAN;YANG CHIH-YUK;FOOTE DAVID K.;BELL SCOTT A.;KARLSSON OLOV B.;LYONS CHRISTOPHER F. |
| 分类号 |
H01L21/311;(IPC1-7):H01L21/00;H01L21/320 |
主分类号 |
H01L21/311 |
| 代理机构 |
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