| 摘要 |
According to an aspect of the present invention, there is provided an inspection apparatus using an optical interferometer including splitting and combining means (3) for splitting light from a light source (1) into incident light (41) irradiated on a sample and reference light (40) and combining signal light which is light scattered or reflected by the sample (7, 42) and the reference light, a modulator (4, 5, 10) for subjecting the reference light to phase modulation and a photo detector (9) for detecting light combined by the splitting and combining means (3), the inspection apparatus further including first detecting means (12-1) for detecting amplitudes of first signal components having frequencies of multiples of odd numbers of a fundamental modulation frequency of the modulator in a signal from the photo detector (9), second detecting means (12-2) for separating and detecting amplitudes of second signal components having frequencies of multiples of even numbers of the fundamental modulation frequency in the signal from the photo detector and means (14) for calculating an intensity of the signal light by using the amplitudes of the first and the second signal components for providing high signal stability and signal-to-noise ratio and in measuring a sample of a biomedical tissue or the like having large scattering or attenuation of light, distributions of a refractive index and an extinction coefficient up to a portion having a large depth can be measured with high accuracy.
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