| 摘要 |
An apparatus of the present invention for testing a test piece comprises a contactor including a clock circuit capable of varying the frequency and a pattern signal generating circuit for generating a test pattern signal in conformity with the frequency of the clock circuit. It is possible for the contactor to further include a comparator circuit. These circuits are controlled by a control signal supplied from a tester. The contactor of the present invention also includes a via hole formed in a surface region of the contactor substrate for receiving the probe terminal, a conductive layer covering the inner circumferential surface of the via hole, and a wiring pattern electrically connected to the conductive layer.
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