发明名称
摘要 An ohmic electrode to p-type II-VI compound semiconductor and its fabricating method are disclosed. The ohmic electrode comprises: a layer (3) made of Pd or an alloy containing Pd; and a metal layer (4, 5) provided thereon. The fabricating method of an ohmic electrode comprises the steps of: providing a layer (3) made of Pd or an alloy containing Pd on a p-type II-VI compound semiconductor layer (2); and providing a metal layer (4, 5) on the layer (3) made of Pd or an alloy containing Pd. Light emitting devices such as a semiconductor laser and a light emitting diode which use the ohmic electrode as the p-side electrode are also disclosed. <IMAGE>
申请公布号 JP3278951(B2) 申请公布日期 2002.04.30
申请号 JP19930032741 申请日期 1993.01.28
申请人 发明人
分类号 H01L21/28;H01L21/443;H01L31/0224;H01L33/04;H01L33/28;H01L33/30;H01L33/40;H01S5/00;H01S5/042;H01S5/327 主分类号 H01L21/28
代理机构 代理人
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