| 摘要 |
PURPOSE:To eliminate defects in external electrodes due to repeated driving or high speed operation and provide potential long lives by solder plating the surfaces of the external electrodes which are to be connected with internal electrodes at intervals of one layer. CONSTITUTION:A piezoelectric ceramic 1 and an internal electrode 2 are alternately formed and sintered into one piece. The surfaces of external electrodes which are to be connected with the internal electrodes 2 at intervals of one layer, are plated with solder 5. In the above manufacturing method of a multilayer piezoelectric actuater, conductor paste is printed as internal electrodes 2 on green sheets, and the green sheets are stacked and press bonded. The green sheets are sintered into one piece, and subsequently external electrodes 4 are connected with the internal electrodes 2 at intervals of one layer. In the process mentioned above, after the conductor paste is baked on the sides of the stacked sintered body to obtain the external electrodes 4, solder plating 5 is performed to cover the external electrodes 4. This enables submicron, ultraprecision and high speed positioning. |
