| 发明名称 |
Silicon-containing vinyl copolymer and resist composition containing the same |
| 摘要 |
The present invention relates to a silicon-containing vinyl copolymer which includes a maleic anhydride repeating unit, a norbornene repeating unit with an acid-labile group, and a vinyl repeating unit with a silicon-containing group. The silicon-containing vinyl copolymer is suitable for use as a top layer resist in a bilayer resist system.
|
| 申请公布号 |
US6380339(B1) |
申请公布日期 |
2002.04.30 |
| 申请号 |
US20000749073 |
申请日期 |
2000.12.27 |
| 申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
FANG MAO-CHING;TAI MING-CHIA;CHANG JUI-FA;LIU TING-CHUN;LIN TZU-YU |
| 分类号 |
C08F222/06;C08F230/08;G03F7/004;G03F7/039;G03F7/075;(IPC1-7):C08F130/08 |
主分类号 |
C08F222/06 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
