发明名称 Stripper pretreatment
摘要 Disclosed are compositions useful for the pretreatment of polymeric material to be removed from substrates, such as electronic devices. The compositions of the present invention are particularly suitable for pretreating polymer residues from plasma etch processes. Also disclosed are methods of removing such pretreated polymeric material.
申请公布号 US6379875(B2) 申请公布日期 2002.04.30
申请号 US20010865399 申请日期 2001.05.25
申请人 SHIPLEY COMPANY, LLC 发明人 CHU JOHN CHEUNG-SHING
分类号 G03F7/42;(IPC1-7):G03F7/40;B08B3/00;C11D17/00 主分类号 G03F7/42
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