发明名称 |
Micro-electromechanical arrangement |
摘要 |
The present invention refers to a variable capacitor comprising a first conductive layer, a second conductive layer and a semiconductor layer, the first and second layers being arranged to be displaced relative to each other under the influence of an electrostatically generated force. The semiconductor layer constitutes a voltage generator, which when exposed to a radiation produces a voltage for charging the first and second conductive layers and induces the electrostatically generated force.
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申请公布号 |
US6380600(B1) |
申请公布日期 |
2002.04.30 |
申请号 |
US20000586971 |
申请日期 |
2000.06.05 |
申请人 |
TELEFONAKTIEBOLAGET LM ERICSSON (PUBL) |
发明人 |
ALPING ARNE;GEVORGIAN SPARTAK |
分类号 |
B81B3/00;H01G5/16;H01L29/93;H03H9/50;(IPC1-7):H01L29/82 |
主分类号 |
B81B3/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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