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发明名称
摘要
申请公布号	JP3280205(B2)	申请公布日期	2002.04.30
申请号	JP19950241518	申请日期	1995.09.20
申请人		发明人
分类号	G01N37/00;G01Q30/08;G01Q30/10;G01Q30/16;G01Q30/20;G01Q90/00;H01J37/20;H01J37/28;(IPC1-7):G01N13/10	主分类号	G01N37/00
代理机构		代理人
主权项
地址

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