| 摘要 |
A biological material analysis system (1000) suitable for analyzing material (1045) on a biochip (1010) is disclosed. The system includes light emitting (1060) and detecting devices (1070) formed using high quality epitaxial layers of compound semiconductor materials (1112) overlying an accommodating buffer layer (1160) on a silicon wafer (1150). The accommodating buffer layer is a layer of monocrystalline material spaced apart from the silicon wafer by an amorphous interface layer. The amorphous interface layer dissipates strain and permits the growth of a high quality monocrystalline accommodating buffer layer. Any lattice mismatch between the accommodating buffer layer and the underlying silicon substrate is taken care of by the amorphous interface layer. |
