| 发明名称 |
ELEMENTO DA COSTRUZIONE MICROMECCANICO E PROCEDIMENTO DI FABBRICAZIONE |
| 摘要 |
A micromechanical component having a substrate and a diaphragm positioned on the substrate. Underneath the diaphragm a region made of porous material is provided, which mechanically supports the diaphragm and thermally insulates it. |
| 申请公布号 |
ITMI20012128(A1) |
申请公布日期 |
2002.04.29 |
| 申请号 |
IT2001MI02128 |
申请日期 |
2001.10.16 |
| 申请人 |
ROBERT BOSCH GMBH |
发明人 |
BENZEL HUBERT;WEBER HERIBERT;SCHAEFER FRANK |
| 分类号 |
B81B1/00;B81B3/00;B81B7/00;B81C1/00;G01J5/02;G01J5/12;G01J5/14;G01N25/68;G01N27/22 |
主分类号 |
B81B1/00 |
| 代理机构 |
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代理人 |
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