Scanner for precise movement and low power consumption

摘要

An apparatus and method for moving a first object relative to a second object is provided. One of the first and second objects is moved and thereby guided by a tracking device. The tracking device uses a pattern on the first object and/or second object and a releasable clamping device for holding the first and second object in contact. The first and second object can then be releasably clamped such that the patterns match and the clamping device holds the first and second object in a position defined by the pattern. This invention is particularly well suited for nanomechanical or micromechanical applications.