WAFER HOLDING JIG, WAFER HOLDER AND HEAT TREATING FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a low-cost wafer holding jig, a wafer holder and a heat treating furnace which sufficiently suppresses slip generation in a high temperature heat treatment of silicon wafers, without deteriorating the productivity. SOLUTION: The wafer holding jig is a plat-like holding jig for mounting a wafer on the upside, comprising three or more wafer receiving members having wafer supports on the jig, and at least one of the receiving members has a plurality of projective wafer supports on the upside and is composed of a movable receiving member having a movable structure relative to the holding jig so that the wafer is supported with at least four wafer supports. The holder and the heat treating furnace incorporate a plurality of the wafer holding jigs each.