TIMING CONFIRMATION METHOD FOR SEMICONDUCTOR TEST DEVICE, AND CORRECTION METHOD AND CORRECTION DEVICE FOR TIMING

摘要

PROBLEM TO BE SOLVED: To confirm a skew of a signal outputted from each driver without sequentially bringing a probe of an oscilloscope into contact with contact pads. SOLUTION: In this method, the respective contact pads 81-8n of a socket are short-connected to a short terminal 2S such that the respective contact pads 81-8n have equal length and equal impedances to the short terminals 2S. A control circuit 10 makes a driver 21 of a tester pin of a time confirmation target output a signal waveform 81S having amplitude changing from a low level (1 [V]) to a high level (2 [V]) to the short terminal 2S, and makes the other drivers 22-2n output signal waveforms 82S-8nS each having an unchangeable amplitude of the low level (1 [V]) to the short terminal 2S. The respective signal waveforms 81S-8nS are composed in the short terminal 2S. By measuring the timing in an amplitude change point of the composed waveform, a time until the signal outputted from the driver 21-2n of the tester pin of the time confirmation target arrives at the short terminal 2S, i.e., the skew is accurately measured.