THREE-DIMENSIONAL SHAPE MEASURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a three-dimensional shape measuring device having a high minimum resolution and a large measurable maximum value. SOLUTION: This three-dimensional shape measuring device is equipped with a projection optical system 113, an imaging optical system 111, a reference pattern image preservation file 117b for preserving a reference pattern image, and a shape operation means 117a for operating the three-dimensional shape of a measuring object 1 by comparing the point of measurement 1a' extracted from an imaged illumination pattern image with the coordinate of a reference point 2a' corresponding to the point of measurement 1a' on the reference pattern image. The device is also equipped plurally with at least one of the pattern projection optical system and the imaging optical system in order to acquire plural illumination pattern images. The reference pattern image is preserved in the reference pattern image preservation file 117b in each plural pattern projection optical systems or imaging optical systems 111, 112. The device is also equipped with an integrated operation means 117c for integrating plural operation results operated by the shape operation means 117a based on the acquired plural illumination pattern images and the reference pattern images corresponding the illumination pattern images.