| 摘要 |
PROBLEM TO BE SOLVED: To attain the improvement of detecting accuracy and miniaturization by eliminating a conventional flow straightening chamber, and forming the hole face of a gas guide hole flush with the end face of a peripheral passage. SOLUTION: This gas rate sensor is provided with an annular plate 41 provided facing a gas outlet hole 4b of a gas pump 4 through a cavity part 20, and the gas guide hole 5e formed in the annular plate 41 so as to correspond to the gas outlet hole 4b. The hole face 5eA of the gas guide hole 5e is constituted to be in direct contact and flush with the end face 1dA of the peripheral passage 1d.
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