ANGULAR VELOCITY SENSOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an angular velocity sensor with improved output precision and a manufacturing method for it so as to precisely form a detection electrode and a drive electrode. SOLUTION: The drive electrode 13 and the detection electrode 14 arranged adjacently to each other in a first oscillation body 11 are separated from each other by means of laser irradiation so that a width of a clearance between them is kept constant, and consequently, the output precision is stabilized.