发明名称 TEMPORARY ADHESIVE
摘要 PROBLEM TO BE SOLVED: To provide pre-setting adhesive which can form a coating film excellent in thickness uniformity without detriment to production efficiency in the present state to thereby decrease the trouble of warp of wafer, etc. SOLUTION: This adhesive is prepared by dissolving a synthetic resin or a natural resin in a solvent, provided that the solvent is a mixture comprising a major amount of methyl ethyl ketone and a minor amount of at least either propylene glycol monomethyl ether or butyl acetate.
申请公布号 JP2002121534(A) 申请公布日期 2002.04.26
申请号 JP20000310648 申请日期 2000.10.11
申请人 FUJIFILM ARCH CO LTD 发明人 YOSHIMOTO YASUBUMI
分类号 B24B37/30;C09J11/06;C09J201/00;H01L21/304 主分类号 B24B37/30
代理机构 代理人
主权项
地址