| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a liquid crystal display device mounting a planar type LDDTFT and an auxiliary capacitor and its manufacturing method in which the occupancy area of the auxiliary capacitor can be made smaller in a short process. SOLUTION: Since a capacitor opening 11 is made inside a high impurity concentration layer 54 to be a bottom section capacitor electrode, the corners of the electrode is not covered by a capacitor insulating film even though a capacitor insulating film 12 is thinly formed, thinning of the film at the corners and concentration of electric field are avoided and reduction in the occupancy area of the auxiliary capacitor and high reliability are realized. Moreover, laser annealing is required for only once because the gate electrode of a TFT and the layer of an upper section capacitor electrode of the auxiliary capacitor are made different.</p> |
