| 摘要 |
PROBLEM TO BE SOLVED: To provide a wafer-conveying device that can accurately carry out teaching, at the same time, can improve working efficiency, and can secure the safety of an operator in small working space. SOLUTION: This wafer-conveying device 22 moves a wafer retention tool 26 along a movement path based on data being stored in advance, conveys a wafer retained by the wafer retention tool 26 to a target position on a stage 18, and has a detection means 42 for detecting the relationship between the target position on the stage 18 and the position of the wafer retention tool 26 when the wafer retention tool 26 is moved to a preset position on the stage 18. According to the detection result of the detection means 42, the data of the movement path can be corrected so that the position of the wafer retention tool 26 is aligned at the target position on the stage 18. |
