发明名称 |
METHOD AND DEVICE FOR SIMULATING TEMPERATURE CONTROL |
摘要 |
PROBLEM TO BE SOLVED: To provide a temperature control simulation method/device for obtaining a developing method of a temperature control algorithm and an operating method of the temperature control without using an actual furnace, by generating a temperature system simulation model showing a response equal to the temperature change in the actual furnace on a computer in the process device of an electric furnace, a gas furnace and a vapor furnace. SOLUTION: A transmission function for showing the relation of temperature output against heater input is obtained, and the temperature control simulation of a heating furnace is performed with the transmission function as that which a temperature system simulation device has.
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申请公布号 |
JP2002124481(A) |
申请公布日期 |
2002.04.26 |
申请号 |
JP20010158257 |
申请日期 |
2001.05.28 |
申请人 |
HITACHI KOKUSAI ELECTRIC INC |
发明人 |
TANAKA KAZUO;YAMAGUCHI HIDETO;URABE KENZO |
分类号 |
F27D19/00;G05B17/02;G06F17/13;H01L21/205;H01L21/22;(IPC1-7):H01L21/22 |
主分类号 |
F27D19/00 |
代理机构 |
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地址 |
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