发明名称 METHOD AND DEVICE FOR SIMULATING TEMPERATURE CONTROL
摘要 PROBLEM TO BE SOLVED: To provide a temperature control simulation method/device for obtaining a developing method of a temperature control algorithm and an operating method of the temperature control without using an actual furnace, by generating a temperature system simulation model showing a response equal to the temperature change in the actual furnace on a computer in the process device of an electric furnace, a gas furnace and a vapor furnace. SOLUTION: A transmission function for showing the relation of temperature output against heater input is obtained, and the temperature control simulation of a heating furnace is performed with the transmission function as that which a temperature system simulation device has.
申请公布号 JP2002124481(A) 申请公布日期 2002.04.26
申请号 JP20010158257 申请日期 2001.05.28
申请人 HITACHI KOKUSAI ELECTRIC INC 发明人 TANAKA KAZUO;YAMAGUCHI HIDETO;URABE KENZO
分类号 F27D19/00;G05B17/02;G06F17/13;H01L21/205;H01L21/22;(IPC1-7):H01L21/22 主分类号 F27D19/00
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