METHOD OF MANUFACTURING ELECTRODE OF COMPOUND SEMICONDUCTOR

摘要

PROBLEM TO BE SOLVED: To provide a method of manufacturing an electrode having ohmic contacts to be easily formed on a compound semiconductor, especially an n-type ZnSe compound semiconductor. SOLUTION: The method of manufacturing an electrode comprises a process of etching a ZnSe substrate 1 with an etchant and then forming a protective film 3 by depositing a deposit generated by the etching reaction on the etched surface of the ZeSe substrate 1, and a process of removing the protective film 3 formed on the surface of the ZeSe substrate 1 and then forming an electrode 4 on the exposed surface of the substrate 1.