| 摘要 |
PROBLEM TO BE SOLVED: To reduce a cost by applying a constitution in which only one range finder is used. SOLUTION: A laser beam emitted from a laser diode 4 is reflected by a rotating mirror 5. The reflected laser beam gives the state where the surface of a measuring object 1 is scanned from the upstream side to the downstream side, and the laser beam reflected by the surface of the measuring object 1 is received by a light-receiving lens 7. Only the laser beams reflected on the spots P1, P2 can pass a slit plate 8 and reach a photomultiplier 9. When inputting respectively distance detection pulses on each spot from the photomultiplier 9, a flatness operation circuit 3 determines the distance from the range finder 2 to the surface of the measuring object 1 based on the time from the point of time when a signal of a start pulse detector 6 is inputted, and furthermore operates the flatness.
|
